HITACHI
CG4000
- Year
- N/A
- Operational
- Unknown
- Install
- Installed - Powered On
- Location
- Taiwan
About this asset
SEM - Critical Dimension (CD) Measurement
Configuration
Tool config is based on original PO, please verify tool details at tool inspection
Software Version: 35.43 System Power Rating: 208 AC 3 Phase Loading Configuration: 3 L/Ps
Damage/Missing parts list Please inspect tool to reconfirm Dry pumps and customer provided items not included on sales
About HITACHI CG4000
Hitachi High-Tech offers a range of advanced industrial equipment solutions for assembly and processing machines used in the production of lithium batteries, auto parts and advanced film. Also offered R&D equipment necessary for the development of FC, organic materials, and catalyst materials.
The CG4000 is a cutting-edge solution for process applications, offering advanced functions that enhance both precision and efficiency. Its high-accuracy averaged CD (ACD) metrology function improves repeatability and throughput, while its industry-standard line edge roughness (LER) measurement function contributes significantly to process monitoring. These features make the CG4000 an essential tool for maintaining high standards in process applications.
