GENI-SYS

MiCAP Number 1494029

Section 1: Tool General Information Micron MISTI/LID # HALYK22200 Vendor Tool Serial # 2311-1HHG2 Tool Current Status In Production Tool Location Cleanroom Any modification/ conversion/ refrofit was perform to the tool? No Any defective or missing parts No

Section 2: Tool Specific Information OEM HPSP Tool Model GENISYS

Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc) Part Type Part Description Part number Date of Change Qty Remark 1 N/A 2 3

For multi-chms system, please indicate the chamber type of individual chm, do not use Micron Proprietary names for Chemical/Gases (Section is also application to tank configuration for Wet bench) Chamber Description Chamber Chemicals Gases Used Chamber Furnace vertical batch furnace P-N2,N2,Hi-H2,Hi-N2 Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber Chamber

*All OEM cable connecting between FAB to SubFab are required to be list out (Include length in mm) Cable Description Length 1 AC/DC Power cable 25 2 I/F cable 25 3 Heater powre cable 25