PROVE COMPACT

·      Factory Interface (FI) with 1 loadport for SMIF pod RSP-200 ·      Separate electronic cabinets reduce footprint of main tool and separates heat generation sources. ·      Separate pre climatization unit to supply conditioned air for main chamber environment control. ·      Operator desk with dual monitors for simultaneous view of tool PC and station controller. ·      Transfer Chamber o   6 axis external handling robot for moving masks from loadport to library to internal handling systems o   Internal handling robot interfaces with fine alignment station for accurate mask edge detection. o   Mask library can accommodate 10 masks within the tool at any time. ·      Process Chamber o   Temperature and humidity controlled chamber o   Ultra precision stage for measuring mask in face up position. o   Stage rests on advanced damping devices to achieve optimal registration repeatability. ·      Imaging optics o   193nm excimer source with a 25um field of view capable of registration measurements in both reflection and transmission mode o   Capable of through pellicle measurements for optical masks. o   Red vis camera for coarse alignment and mask position measurements. o   Measurement speed is 600 sites per hour with 5 plane measurements and up to 1000 sites per hour with 1 plane measurement ·      Performance for both reflection and transmission mode measurements: o   Long term registration repeatability of < 0.55nm with first order corrections and <0.8nm with 0th order corrections o   Registration accuracy < 0.95nm o   Screen linearity < 1nm o   Centrality repeatability <10um ·       Additional details available upon request