EVATEC / BALZERS
LLS EVO II
- Year
- N/A
- Operational
- Unknown
- Install
- Installed - Powered On
- Location
- United States
About this asset
PVD (Physical Vapor Deposition)
Configuration
Chiller in Sub Fab
Notes:
1. One I/O beckoff card needs to be replaced (we have it in stock)
Date of Audit
11/25/2025
Fab Equipment ID
LLSSPUTTER001
Manufacturer (Make)
UNAXIS
Model
LLS EVO II
Serial Number
10173806
Wafer Size (inches)
6
Install Type: TTW / Stand-Alone
TTW
OEM MFG Date
2005
Install Date
1/1/2006
Date of Last PM
11/1/2024
Is System On-Line?
No
Off-Line Date (if applicable)
11/1/2024
Can Produce Wafers As-Is?
No (see notes)
CE Mark Certified?
Yes
Are any Manuals included?
Yes
Any Field Modifications?
No
All Cables present?
Yes
Any Corrosion visible on modules?
No
Any Missing / Damaged Parts?
Yes (see note 1)
Shipping Brackets Included?
No
Robot Type
NA (manual loading)
Pre-Aligner?
No
Mini-Environment
No
System SW (OS) version
Windows XP SP3
System SW (App) version
V06R20
Log-In User Name
metal PLCPC: llsnet
Log-In Password
metal1 PLCPC: unaxis
GEM / SECS?
Yes
Ethernet
Yes
Power Supply
400V 3L+N+PE
AC Dist Box
AC Cabinet
Ext Transformer
Yes (qty 3)
UPS
Yes Eaton 9130
Heat Exchanger / Chiller
No
Backing Pump(s)
Yes
Polycold
Yes
CDA
Yes
DIW
Yes
Vacuum
NA
Gas
ARGON, OXYGEN, N2
Power
400V 3L+N+PE
About EVATEC / BALZERS LLS EVO II
The LLS EVO II is the flexible load lock platform for deposition of metals, TCOs and magnetic films with a whole host of new features that enhance productivity and reduce materials consumption. Whether its new oval cathode technology for reduced materials costs and particles, next generation magnet systems for enhanced target life, or the new high speed pumping solution, the new LLS EVO II platform raises yields and lowers production costs.
