NIKON
NSR-2205i12D
- Year
- N/A
- Operational
- Unknown
- Install
- Installed - Powered On
- Location
- United States
About this asset
i-Line Stepper
Configuration
Wafer Size (inches)
6
Install Date
≈2018
Is System On-Line?
NO
Off-Line Date (if applicable)
8/22/2025
Can Produce Wafers As-Is ?
YES
CE Mark Certified ?
YES
Are any Manuals included ?
Partial
OEM Audit Available?
NO
3rd Party Audit Available ?
NO
Decontamination Report Exists?
YES
Any Field Modifications ?
YES
All Cables present ?
YES
Any Corrosion visible on modules ?
NO
Any Missing / Damaged Parts ?
NO
Shipping Brackets Included ?
NO
Wafer Handler
YES
Handler Type
SiC Handling
# of Cassette / FOUP Loaders
Cassette Stage
Robot Type
OEM
End-Effecter Type
OEM
Pre-Aligner ?
YES
Mini-Environment
YES
Handler Options ?
SiC substrate
System SW (OS) version
Nikon Nest
GEM / SECS ?
Yes
Supporting Equipment
Std OEM items
CDA
N2
DIW
Chilled Water
Vacuum
Yes
Gas
NA
Power
208 3-phase
Notes: Purchased from Nikon as used-refurbished.
About NIKON NSR-2205i12D
Semiconductors control a host of functions in electronic equipment. Nikon offers a stellar lineup of cutting-edge lithography systems that support precision circuit design down to the nanometer level.
"This i-line stepper from Nikon is one of our most popular lithography systems. Resolution ≦ 350 nm, exposure light source i-line (365 nm wavelength), reduction ratio 1:5, exposure field 22mm square to 17.9 (H) × 25.2 (V) mm (6-inch reticle), 20.0 × 20.4 mm (5-inch reticle), alignment accuracy (EGA, |M| + 3σ) ≦ 55 nm. The NIKON NSR 2205 i12D is a Steppers and Scanners system. The NSR 2205 i12D can be used with 8” wafer sizes.
