LAMINA-203

·      Wafer Size: 150mm ·      System safely transfers reticle between 3 different reticle boxes: RSP, blank and shipping boxes ·      Four main modules: BBO, CSO, SCARA, and Utility module ·      SCARA module: o   Centralized mask handling SCARA robot o   Handoff station o   Environment control: two fan filter units (FFU’s), two ionizing bars, and three static tips for measuring ambient air pressure ·      BBO (blank box opener) module: removes box lid, rotates the box 90degress to present mask to SCARA robot, and has its own environmental control o   Automation partition door o   Environment control: single FFU, ionizer bar, yellow filtered utility light, operator access door with interlocking switch, electro-magnetic locks, two static tips for measuring ambient air pressure ·      CSO (Clam Shell opener) module: open lid of clam shell type shipping removes box lid, present mask to SCARA robot, and has its own environmental control o   Automation partition door o   Environment control: single FFU, ionizer bar, yellow filtered utility light, operator access door with interlocking switch, electro-magnetic locks, two static tips for measuring ambient air pressure ·      Utility module: Houses all system electronics, pneumatics, and vacuum distribution. Fully partitioned from mask handling operations and so maintains only fab ambient pressure and cleanliness o   AC power distribution o   Controllers: SCARA robot controller, BBO controller, pneumatics/vacuum distribution o   PC o   HMI differential pressure gauge (w/ switch and two diff. pressure switches) ·      In addition, Lamina 203 system is equipped with front light tower, front/back/side EMO, and ON/OFF buttons. ·      System control via touch screen (GUI) mounted on the system, or by remote HSMS communication. ·      Additional details available upon request